| Description | CVD | PVD |
| Source material state | Gas precursor | solid |
| Process | Chemical reaction in gaseous phase, importance of fluid dynamics | Evaporation and collision impact on the solid target |
| Temperatures | Higher, appx 600-1100 ˚C | Lower, appx below 450 ˚C |
| Layers Coating thickness | Multi layer possible Thicker and thin both | Majorly single layer thin |
| Wear resistance, toughness | High, low | Less, higher |
| State of stress in coating | Tensile | Compressive |
| Used for | Elements, compounds, alloys difficult | Alloys easily |
| Process, Material | Each process is material specific | One process, many materials |
| Line of sight | Not needed | Needed |
| Step Coverage | Better (50-100%), can even fill gaps | Poor |
